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SRD 880S
产品描述

- Manufacturer  : M TEK
- Type : SRD Wafer Cleaning
- Model: SRD 880S

技术支持

Semitool 880S “Dual Stack” SRD consisting of:        
- Dual PSC-101 Controllers                                    
- Anti-Static with N2 Purge                                  
- Emergency Power Off (EPO)                              
- Resistivity Monitor and Water Circulation               
- Quick Disconnect Rotor                                     
- N2 Rear Seal                                                     
- Capable of processing up to 8"/200mm wafers.    
- rotors included 2xsemitool rotor A192-81M 150MM.

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